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Updated: Jun 21, 2026

High Spatial Resolution Chemical Imaging of Implant-Associated Infections with X-ray Excited Luminescence Chemical Imaging Through Tissue
Published on: September 30, 2022
Advanced thin film technology for ultrahigh resolution X-ray microscopy
Joan Vila-Comamala1, Konstantins Jefimovs, Jörg Raabe
1Paul Scherrer Institut, CH-5232 Villigen, Switzerland. joan.vila@psi.ch
Abstract:
Further progress in the spatial resolution of X-ray microscopes is currently impaired by fundamental limitations in the production of X-ray diffractive lenses. Here, we demonstrate how advanced thin film technologies can be applied to boost the fabrication and characterization of ultrahigh resolution X-ray optics. Specifically, Fresnel zone plates were fabricated by combining electron-beam lithography with atomic layer deposition and focused ion beam induced deposition. They were tested in a scanning transmission X-ray microscope at 1.2 keV photon energy using line pair structures of a sample prepared by metal organic vapor phase epitaxy. For the first time in X-ray microscopy, features below 10nm in width were resolved.
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