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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Tuning nanoelectromechanical resonators with mass migration.
Kwanpyo Kim1, K Jensen, A Zettl
1Department of Physics and Center of Integrated Nanomechanical Systems, University of California at Berkeley, Berkeley, California 94720, USA.
Nano Letters
|August 4, 2009
Summary
We show how to tune nanoelectromechanical resonators by moving nanoparticles. Electrical currents shift nanoparticle mass, stably changing resonant frequencies by up to 20% for various applications.
Area of Science:
- Physics
- Materials Science
- Nanotechnology
Background:
- Nanoelectromechanical systems (NEMS) are crucial for sensing and signal processing.
- Controlling the resonant frequency of NEMS is essential for device performance and tunability.
- Existing tuning methods often lack nonvolatility or broad applicability.
Purpose of the Study:
- To demonstrate a novel method for tuning nanoelectromechanical resonators.
- To investigate the use of mass migration for resonant frequency control in NEMS.
- To establish the robustness and frequency range of this tuning technique.
Main Methods:
- Utilizing electrical currents to induce reversible mass migration of indium nanoparticles.
- Employing cantilevered multiwalled carbon nanotube resonators as the NEMS platform.
- Measuring resonant frequency shifts resulting from nonvolatile mass redistribution.
Main Results:
- Achieved stable resonant frequency shifts as large as 20% through nanoparticle migration.
- Demonstrated nonvolatile control over mass distribution and its effect on resonance.
- Confirmed the method's applicability across a wide frequency range, from audio to microwave.
Conclusions:
- Mass migration is an effective strategy for tuning nanoelectromechanical resonators.
- The demonstrated electrical control method offers robust and nonvolatile frequency adjustment.
- This technique holds promise for diverse NEMS applications requiring tunable resonant frequencies.

