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Size dependence of microscopic Hall sensor detection limits.

K Vervaeke¹, E Simoen, G Borghs

¹Interuniversity Microelectronics Center (IMEC vzw), Kapeldreef 75, Leuven B-3001, Belgium.

The Review of Scientific Instruments

|August 7, 2009

Summary

This study explores how the size of microscopic Hall sensors affects their magnetic field detection limits. Sensor size significantly impacts detection at room temperature but not at low temperatures, explained by semiconductor noise theory.

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Area of Science:

Solid State Physics
Semiconductor Device Physics
Materials Science

Background:

Microscopic Hall sensors are crucial for magnetic field detection.
Understanding factors influencing their detection limits is essential for device optimization.
Previous research has explored various aspects of Hall sensor performance.

Purpose of the Study:

To investigate the magnetic field detection limits of microscopic Hall sensors.
To determine the influence of sensor lateral size on detection limits.
To analyze the temperature-dependent behavior of these limits.

Main Methods:

Experimental investigation of Hall sensors fabricated from GaAs/AlGaAs heterostructures and silicon.
Utilizing Hall effect measurements to assess sensor performance.
Employing noise spectrum measurements to analyze signal-to-noise ratios.

Main Results:

A clear size dependence of the magnetic field detection limit was observed at room temperature.
This size dependence disappeared at low temperatures.
Experimental data aligns with theoretical predictions from the theory of noise in semiconductors.

Conclusions:

The lateral size of microscopic Hall sensors significantly affects their magnetic field detection limits, particularly at room temperature.
Temperature plays a critical role in modulating the size-dependent performance of these sensors.
The findings provide valuable insights into optimizing Hall sensor design and operation based on semiconductor noise characteristics.