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Size dependence of microscopic Hall sensor detection limits
K Vervaeke1, E Simoen, G Borghs
1Interuniversity Microelectronics Center (IMEC vzw), Kapeldreef 75, Leuven B-3001, Belgium.
Abstract:
In this paper the magnetic field detection limits of microscopic Hall sensors are investigated as a function of their lateral size. Hall sensors fabricated from GaAs/AlGaAs heterostructures and silicon are experimentally investigated at different temperatures using Hall effect and noise spectrum measurements. At room temperature a clear size dependence of the detection limit is observed, whereas at low temperatures this dependence is found to disappear. The results are explained using the theory of noise in semiconductors.
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