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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Nonequilibrium steady-state fluctuations in actively cooled resonators

M Bonaldi1, L Conti, P De Gregorio

  • 1Istituto di Fotonica e Nanotecnologie, CNR-Fondazione Bruno Kessler, 38100 Povo, Trento, Italy. bonaldi@science.unitn.it

Physical Review Letters
|August 8, 2009
PubMed

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