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Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
Published on: June 18, 2020
Nano-structured TiO(2) film fabricated at room temperature and its acoustic properties
Abstract:
Nano-structured TiO(2) thin film has been successfully fabricated at room temperature. Using a quarter wavelength characterization method, we have measured the acoustic impedance of this porous film, which can be adjusted from 5.3 to 7.19 Mrayl by curing it at different temperatures. The uniform microstructure and easy fabrication at room temperature make this material an excellent candidate for matching layers of ultra-high frequency ultrasonic imaging transducers.

