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Estimation of phase derivatives using discrete chirp-Fourier-transform-based method.

Sai Siva Gorthi¹, Pramod Rastogi

¹Applied Computing and Mechanics Laboratory, Ecole Polytechnique Fédérale de Lausanne,1015 Lausanne, Switzerland.

|August 18, 2009

Summary

This study introduces a novel discrete chirp-Fourier transform method for precisely estimating phase derivatives in optical metrology. The technique accurately measures phase changes, even with noisy data, enhancing interferometric measurements.

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Area of Science:

Optical Metrology
Interferometry
Signal Processing

Background:

Accurate phase derivative estimation is crucial for interferometric measurements.
Existing methods may struggle with noise and direct estimation challenges.

Purpose of the Study:

To introduce a novel method for direct phase derivative estimation.
To enhance accuracy in optical metrology, particularly in digital holographic interferometry.
To demonstrate robustness against noise.

Main Methods:

Utilizing the discrete chirp-Fourier transform (DCFT).
Applying the DCFT to reconstructed interference fields.
Validating through simulations and experimental data.

Main Results:

The DCFT method provides accurate and direct phase derivative estimation.
The method performs well even in the presence of significant noise.
Successful application demonstrated in digital holographic interferometry.

Conclusions:

The proposed DCFT method is a valuable tool for phase derivative estimation in optical metrology.
It offers improved accuracy and noise resilience for interferometric analysis.
The method's utility is confirmed by simulation and experimental validation.