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Updated: Jun 20, 2026
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Published on: August 17, 2017
Optical filters fabricated in hybrimer media with soft lithography
Kyu J Lee1, Jungho Jin, Byeong-Soo Bae
1Department of Electrical and Computer Engineering, University of Connecticut, Storrs, Connecticut 06269, USA.
Abstract:
Fabrication and characterization of guided-mode resonance filters made by soft lithography are presented. As these resonant elements are highly sensitive to parametric variations, it is important to develop methods for their reliable fabrication. Thus, we provide a fabrication process that is consistent and simple, employing an elastomeric mold and a UV-curable organic-inorganic hybrid material. Measured spectra show approximately 81% reflectance and approximately 8% transmittance at a resonance wavelength of 1538 nm. The filter's linewidth is approximately 4.5 nm, and the sideband reflectance is approximately 5%. Experimental and theoretical results are in good agreement.
