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Updated: Jun 20, 2026
10:25
Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Aberration-corrected scanning transmission electron microscopy: from atomic imaging and analysis to solving energy
S J Pennycook1, M F Chisholm, A R Lupini
1Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA. pennycooksj@ornl.gov
Summary
Aberration-corrected scanning transmission electron microscopy (STEM) offers enhanced resolution and single-atom sensitivity. This advanced technique provides new insights into energy materials, catalysis, and nanostructures.
Area of Science:
- Materials Science
- Physics
- Chemistry
Background:
- Aberration-corrected scanning transmission electron microscopy (STEM) has advanced beyond initial resolution improvements.
- New capabilities include enhanced single-atom sensitivity for imaging and spectroscopy.
Purpose of the Study:
- To review recent advances in aberration-corrected STEM.
- To highlight applications in energy, catalysis, and nanomaterials.
Main Methods:
- Utilizing aberration-corrected STEM for high-resolution imaging and spectroscopy.
- Applying Z-contrast imaging and phase contrast imaging with pixel-by-pixel correlation.
- Employing optical sectioning for 3D information extraction.
Main Results:
- Demonstrated enhanced lateral resolution and single-atom sensitivity.
- Enabled detection of light elements in Z-contrast images.
- Revealed depth sensitivity and 3D information capabilities.
- Applied to study catalytic activity of gold nanoparticles, nanowire growth, and ionic conductivity in superlattices.
Conclusions:
- Aberration-corrected STEM provides significant advancements in materials characterization.
- The technique offers novel insights into energy-related phenomena and material properties.
- Future directions include further applications in solving energy challenges.
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