Negative spherical aberration ultrahigh-resolution imaging in corrected transmission electron microscopy

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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

Knut W Urban1, Chun-Lin Jia, Lothar Houben

  • 1Institute of Solid State Research and Ernst Ruska Centre for Microscopy and Spectroscopy with Electrons, Research Centre Jülich, 52425 Jülich, Germany. k.urban@fz-juelich.de

Philosophical Transactions. Series A, Mathematical, Physical, and Engineering Sciences
|August 19, 2009
PubMed

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