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Updated: Jun 20, 2026
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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range
Ehsan Shah Hosseini1, Siva Yegnanarayanan, Amir Hossein Atabaki
1School of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive NW, Atlanta, GA 30332-0250, USA.
Optics Express
|August 19, 2009
Abstract:
High quality factor (Q approximately 3.4 x 10(6)) microdisk resonators are demonstrated in a Si(3)N(4) on SiO(2) platform at 652-660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si(3)N(4) layer at the air-substrate interface to improve the coupling.
