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Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides
Jie Teng1, Pieter Dumon, Wim Bogaerts
1Photonics Research Group, INTEC-department, Ghent University-IMEC, Ghent, B-9000, Belgium. jteng@intec.ugent.be
Optics Express
|August 19, 2009
Summary
Athermal silicon ring resonators were achieved by adding a polymer cladding to silicon wires. This significantly reduces temperature-induced wavelength shifts, making silicon photonics more stable.
Area of Science:
- Photonics
- Materials Science
- Optical Engineering
Background:
- Silicon photonics offers miniaturization and high-volume manufacturing potential.
- Temperature fluctuations impact the performance of silicon photonic devices, particularly ring resonators.
- Achieving athermal operation is crucial for reliable silicon photonic integrated circuits.
Purpose of the Study:
- To experimentally demonstrate athermal silicon ring resonators.
- To investigate the effect of polymer cladding on the thermal stability of silicon ring resonators.
- To determine the optimal waveguide dimensions for athermal operation.
Main Methods:
- Fabrication of silicon-on-insulator (SOI) waveguides with a height of 220 nm.
- Narrowing of silicon wires to an ideal width of approximately 350 nm for TE mode.
- Overlaying a polymer cladding layer on the narrowed silicon waveguides.
- Characterization of the wavelength temperature dependence and optical loss of the ring resonators.
Main Results:
- Athermal condition achieved for TE mode in 220 nm-height SOI waveguides with a width around 350 nm.
- Wavelength temperature dependence reduced to less than 5 pm/°C after polymer cladding, an eleven-fold improvement.
- Optical loss of a 350-nm bent waveguide (15 µm radius) reduced to approximately 50 dB/cm.
Conclusions:
- Polymer cladding is an effective method for achieving athermal operation in silicon ring resonators.
- Optimized waveguide dimensions and polymer integration enhance thermal stability and reduce optical loss.
- This advancement is critical for the development of robust and reliable silicon photonic integrated circuits.

