Updated: Jun 20, 2026

Implementation of a Reference Interferometer for Nanodetection
Published on: April 26, 2014
Zhiguang Xu1, Vijay Shilpiekandula, Kamal Youcef-toumi
1Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139, USA. zgxu@mit.edu
This study introduces a novel white-light scanning interferometer for precise air gap measurement between plates. The method enhances accuracy by avoiding chromatic dispersion, offering high resolution for micro-gap analysis.
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