Hybrid integration of Ca 0.28 Ba 0.72 Nb2O6 thin film electro-optic waveguides with silica/silicon substrates

Ca(0.28)Ba(0.72)Nb(2)O(6) (CBN-28) waveguides based on thin film technology were fabricated on SiO(2)/(100) Si substrates. By using X-ray diffraction, we confirmed the preferential c-axis orientation of the CBN structures. An effective unclamped electro-optic r33 coefficient of 12 pm/V was measured in CBN thin films by using an ellipsometric technique in reflection geometry. In addition, by means of a Fabry-Perot technique, the propagation losses of our strip loaded waveguides were estimated to be as low as 4.8 dB/cm and 6.5 dB/cm at telecommunication wavelengths for the fundamental TE and TM modes, respectively.