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Measuring microvibrations by heterodyne speckle interferometry

R Dändliker, J F Willemin

    Optics Letters
    |August 25, 2009
    PubMed

    Abstract:

    In-plane as well as out-of-plane displacements and vibrations of objects with diffusely scattering surfaces are measured in real time. Microvibrations with amplitudes down to 1 nm and frequencies up to 5 MHz were analyzed at a spatial resolution of 35microm.

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