Related Experiment Video
Updated: Jun 20, 2026

07:47
Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
Published on: February 12, 2017
Reactive ion etching of gold-nanoparticle-modified pyrolyzed photoresist films
Ronen Polsky1, Cody M Washburn, Gabriel Montano
1Department of Biosensors & Nanomaterials, Sandia National Laboratories, PO Box 5800, MS-0892, Albuquerque, NM 87185, USA.
Small (Weinheim an Der Bergstrasse, Germany)
|August 29, 2009
Abstract
No abstract available in PubMed .

