Demonstration of microcantilever array with simultaneous readout using an in-plane photonic transduction method

Area of Science:

• Micro-electro-mechanical systems (MEMS)
• Photonics
• Integrated optics

Background:

• Microcantilever arrays are widely used for sensing applications.
• Simultaneous readout of multiple microcantilevers is challenging.
• Photonic transduction offers a label-free and sensitive detection method.

Purpose of the Study:

• To demonstrate a microcantilever array with an in-plane photonic transduction method.
• To achieve simultaneous readout of each microcantilever.
• To assess the signal uniformity of the developed system.

Main Methods:

• Fabrication of a microcantilever array on a silicon-on-insulator substrate.
• Integration of rib waveguides and a waveguide splitter network for light routing.
• Utilizing static asymmetric multimode waveguides and Y-branches for signal detection.
• Employing an InGaAs line scan camera for imaging and differential signal formation.

Main Results:

• Successful demonstration of an in-plane photonic transduction method for microcantilever arrays.
• Simultaneous readout capability for multiple microcantilevers.
• Achieved reasonable signal uniformity for seven out of nine surviving microcantilevers.
• Validated the effectiveness of the waveguide splitter network and detection scheme.

Conclusions:

• The developed photonic transduction method enables efficient and simultaneous readout of microcantilever arrays.
• The system shows promise for high-throughput sensing applications.
• Further optimization can improve signal uniformity and array survival rates.