Tunable oscillation of a high-power argon excimer laser in the vacuum-ultraviolet spectral region

Successful oscillation of a tunable, high-power argon excimer laser is reported. The wavelength was tuned from 124.5 to 127.5 nm with a spectral width of 0.3 nm. The output power of 2.2 MW, obtained at the line center, is 3 orders of magnitude larger than the value reported previously by Wrobel et al. [Appl. Phys. Lett. 36, 113 (1980)]. The possibility of frequency conversion of the argon excimer laser radiation to other wavelengths by a stimulated Raman scattering process is discussed.