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Compact scanning soft-x-ray microscope using a laser-produced plasma source and normal-incidence multilayer mirrors.

J A Trail, R L Byer

|September 16, 2009

Summary

A new scanning soft-x-ray microscope was developed using laser-produced plasma and multilayer mirrors. This compact microscope achieves 0.5 micrometer resolution at 14 nm wavelength with high photon flux, enabling advanced imaging capabilities.

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Area of Science:

Optics and Photonics
Materials Science
Biophysics

Background:

Soft-x-ray microscopy offers high resolution for nanoscale imaging.
Traditional sources often require large facilities and complex infrastructure.
Advancements in laser technology and optics enable compact, high-performance microscopy.

Purpose of the Study:

To construct and characterize a compact scanning soft-x-ray microscope.
To utilize a laser-produced plasma as a soft-x-ray source.
To achieve high spatial resolution and photon flux at a specific wavelength.

Main Methods:

A laser-produced plasma served as the soft-x-ray source.
Normal-incidence multilayer mirrors in a Schwarzschild configuration were used for focusing.
The system was designed for compact integration, including the laser source.

Main Results:

The microscope operates at a 14 nm wavelength.
A spatial resolution of 0.5 micrometers was achieved.
A soft-x-ray photon flux of 10(4)-10(5) sec(-1) was obtained with 170 mW laser power.

Conclusions:

A compact and efficient scanning soft-x-ray microscope has been successfully constructed.
The developed microscope provides high resolution and photon flux suitable for various applications.
The system's compact nature makes advanced soft-x-ray microscopy more accessible.