Resonant-ultrasound spectroscopy for studying annealing effect on elastic constant of thin film

N Nakamura1, T Nakashima, S Oura

  • 1Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan. nobutomo@me.es.osaka-u.ac.jp

Ultrasonics
|September 22, 2009
PubMed