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Updated: Jun 20, 2026

08:46
Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Tomographic imaging of micrometer-sized optical and soft-x-ray beams
Optics Letters
|September 22, 2009
Abstract:
The knife-edge technique for measurements of micrometer-sized beams is extended to two-dimensional imaging by tomographic reconstruction of multiangular knife-edge data. Two-dimensional intensity distributions at optical (633-nm) and soft-x-ray (13.5-nm) wavelengths at the focal region of a Schwarzschild objective are presented. The resolution is limited by the 200-nm step size used in the data acquisition.
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