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Updated: Jun 20, 2026

Fabrication of a Low-Cost, Fiber-Coupled, and Air-Spaced Fabry-Pérot Etalon
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Optical pressure/acoustic sensor with precise Fabry-Perot cavity length control using angle polished fiber.

Wenhui Wang1, Nan Wu, Ye Tian

  • 1Department of Electrical and Computer Engineering, University of Massachusetts Lowell, 1 University Ave., Lowell, MA 01854, USA. Wenhui_wang@uml.edu

Optics Express
|September 23, 2009
PubMed
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This study introduces a new optical fiber sensor for detecting pressure and acoustic signals. Fabricated with high precision, it shows excellent performance compared to existing technologies.

Area of Science:

  • Optoelectronics
  • Materials Science
  • Sensor Technology

Background:

  • Optical fiber sensors offer advantages in harsh environments.
  • Fabry-Perot interferometers are suitable for sensing applications.
  • Precise control of the Fabry-Perot cavity is crucial for sensor performance.

Purpose of the Study:

  • To develop a novel Fabry-Perot (FP) optical fiber sensor for pressure and acoustic measurements.
  • To investigate the fabrication process for precise control of the FP cavity length.
  • To evaluate the static and dynamic performance of the fabricated sensor.

Main Methods:

  • Designed a sensor utilizing two V-shaped grooves, a diaphragm, and an angle-polished fiber.
  • Employed photolithography and anisotropic etching for silicon crystal fabrication.

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Last Updated: Jun 20, 2026

Fabrication of a Low-Cost, Fiber-Coupled, and Air-Spaced Fabry-P&#233;rot Etalon
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Published on: February 3, 2023

Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation
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  • Controlled Fabry-Perot cavity length to the nanometer scale.

    • Main Results:

    • Successfully fabricated optical fiber sensors with precisely controlled cavity lengths.
    • Demonstrated accurate static and dynamic responses.
    • Performance was comparable or superior to commercial pressure sensors and microphones.

    Conclusions:

    • The novel Fabry-Perot optical fiber sensor exhibits precise fabrication and excellent sensing capabilities.
    • This technology holds promise for advanced pressure and acoustic monitoring applications.
    • The sensor design offers a viable alternative to conventional sensing devices.