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Updated: Jun 20, 2026
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Fabrication of a Low-Cost, Fiber-Coupled, and Air-Spaced Fabry-Pérot Etalon
Published on: February 3, 2023
Optical pressure/acoustic sensor with precise Fabry-Perot cavity length control using angle polished fiber
1Department of Electrical and Computer Engineering, University of Massachusetts Lowell, 1 University Ave., Lowell, MA 01854, USA. Wenhui_wang@uml.edu
Optics Express
|September 23, 2009
Summary
This study introduces a new optical fiber sensor for detecting pressure and acoustic signals. Fabricated with high precision, it shows excellent performance compared to existing technologies.
Area of Science:
- Optoelectronics
- Materials Science
- Sensor Technology
Background:
- Optical fiber sensors offer advantages in harsh environments.
- Fabry-Perot interferometers are suitable for sensing applications.
- Precise control of the Fabry-Perot cavity is crucial for sensor performance.
Purpose of the Study:
- To develop a novel Fabry-Perot (FP) optical fiber sensor for pressure and acoustic measurements.
- To investigate the fabrication process for precise control of the FP cavity length.
- To evaluate the static and dynamic performance of the fabricated sensor.
Main Methods:
- Designed a sensor utilizing two V-shaped grooves, a diaphragm, and an angle-polished fiber.
- Employed photolithography and anisotropic etching for silicon crystal fabrication.
- Controlled Fabry-Perot cavity length to the nanometer scale.
Main Results:
- Successfully fabricated optical fiber sensors with precisely controlled cavity lengths.
- Demonstrated accurate static and dynamic responses.
- Performance was comparable or superior to commercial pressure sensors and microphones.
Conclusions:
- The novel Fabry-Perot optical fiber sensor exhibits precise fabrication and excellent sensing capabilities.
- This technology holds promise for advanced pressure and acoustic monitoring applications.
- The sensor design offers a viable alternative to conventional sensing devices.
