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Comparison of film thickness tolerances in waveguide grating couplers
Optics Letters
|September 25, 2009
Abstract:
The effect of guiding-layer thickness variations on grating coupler performance is investigated for three important material systems. The sensitivity of the coupling length and coupling efficiency of these structures to guiding-layer thickness changes differs markedly between the glass, gallium arsenide, and silicon-on-insulator waveguides studied.
