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Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects
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Ab initio study of fluorine in silicon: large clusters and the dominant mobile defect

Kilian Vollenweider1, Beat Sahli, Wolfgang Fichtner

  • 1Integrated Systems Laboratory, ETH Zurich, Gloriastrasse 35, Zurich 8092, Switzerland.

Physical Review Letters
|October 2, 2009
PubMed

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