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Related Experiment Video

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X-ray Schwarzschild objective for the carbon window (lambda approximately 4.5 nm).

Igor Artyukov¹, Yegor Bugayev, Olexander Devizenko

¹X-ray Optics Laboratory, Lebedev Physical Institute, 53 Leninsky Prospekt, Moscow 119991, Russia. iart@sci.lebedev.ru

|October 2, 2009

Summary

Fabricated graded Cobalt/Carbon multilayer mirrors achieve 3%-6% reflectivity for a 21x Schwarzschild objective operating in the 4.5 nm "carbon window" region, enabling full aperture operation.

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Area of Science:

Materials Science
Optics
Nanotechnology

Background:

Multilayer mirrors are crucial for advanced optical systems.
The
carbon window
region (near 4.5 nm) presents unique challenges for mirror fabrication due to material absorption.
Graded multilayer structures offer potential for improved performance over traditional designs.

Purpose of the Study:

To fabricate and characterize graded Cobalt/Carbon (Co/C) multilayer mirrors.
To integrate these mirrors into a 21x Schwarzschild objective (SO).
To evaluate the performance of the SO in the 4.5 nm wavelength range.

Main Methods:

Fabrication of graded Co/C multilayer mirrors using advanced deposition techniques.
Characterization of mirror reflectivity using synchrotron radiation.
Optical testing of the Schwarzschild objective with the fabricated mirrors.

Main Results:

Achieved peak reflectivity of 14.8% for flat Co/C mirrors at 4.48 nm and 5° incidence.
Spherical mirrors exhibited reflectivity of 3%-6% with high spectral matching accuracy (Deltad/d ≈ 0.3%).
The 21x Schwarzschild objective demonstrated full working aperture (NA ≈ 0.2) with a total throughput of 0.25%.

Conclusions:

Graded Co/C multilayer mirrors are suitable for Schwarzschild objectives in the 4.5 nm
carbon window
region.
The fabricated SO shows promising performance for applications requiring high resolution at these wavelengths.
Further optimization of mirror fabrication could enhance overall system throughput and efficiency.