Aberration-free lithography setup for fabrication of holographic diffractive optical elements

Peter Macko1, Maurice P Whelan

  • 1Systems Toxicology Unit, Institute for Health and Consumer Protection, European Commission-DG Joint Research Centre, I-21027 Ispra (VA), Italy. peter.macko@jrc.ec.europa.eu

Optics Letters
|October 2, 2009
PubMed
Summary

This study presents a novel holographic optical lithography setup designed for fabricating diffractive optical elements. These elements efficiently collect fluorescence light from biochips by simulating a point-source light spot.

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