[Quantitative analysis of the concentration of Br-doping in micro-shell coating with XRF]

In inertial confinement fusion (ICF) physics experiment, the micro-shell that contains Br-doped CH coating must be characterized for doping Br concentration level. X-ray fluorescence (XRF), with its unique capability to quantitatively determine concentrations of most elements simultaneously and non-destructively, is generally the method of choice for total dopant (Z > 11) concentration. In the present paper, a method to determine the dopant concentration in ICF micro-shell coating with X-ray fluorescence spectrometry is described, and the calibration model is founded by the calculation of fluorescence intensity of film and micro-shell sample. Based on the calibration model, the fluorescence intensity vs concentration of Br-doped CH coating of micro-shell was obtained. The experiment result shows that X-ray fluorescence spectrometry is a nondestructive and accurate method of measurement of coating dopant in the inertial confinement fusion micro-shell sample, and the measuring error is about 5% for Br doped CH coating of micro-shells with 10 micron thickness coating.