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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics

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Acoustic wave flow sensor using quartz thickness shear mode resonator.

Lifeng Qin¹, Zijing Zeng, Hongbin Cheng

¹Department of Mechanical Engineering and Materials Science, University of Pittsburgh, Pittsburgh, PA, USA.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

|October 9, 2009

Summary

This summary is machine-generated.

This study demonstrates a quartz thickness shear mode (TSM) resonator for real-time liquid flow rate detection. The TSM resonator shows potential as a simple, fast, and repeatable flow sensor.

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Area of Science:

Materials Science
Acoustic Sensors
Fluid Dynamics

Background:

Acoustic wave resonators are sensitive to their surrounding environment.
Accurate real-time liquid flow rate measurement is crucial in various scientific and industrial applications.
Existing flow sensors may have limitations in response time, complexity, or repeatability.

Purpose of the Study:

To investigate the use of a quartz thickness shear mode (TSM) bulk acoustic wave resonator for in situ and real-time liquid flow rate detection.
To design and evaluate a specialized flow chamber for integrating the TSM resonator into a flow system.
To analyze the relationship between resonant frequency shifts and volumetric flow rates.

Main Methods:

A 5-MHz quartz TSM resonator was employed within a custom-designed acrylic flow chamber.
The resonator was partially exposed to the flowing liquid, with the other side exposed to air.
Electrical impedance spectra were measured using an impedance analyzer, and resonant frequencies were extracted via data fitting.
Flow rates were varied from 0 to 3000 mL/min, corresponding to Reynolds numbers from 0 to 822.

Main Results:

Significant resonant frequency shifts were observed across multiple harmonic modes (fundamental, 3rd, 5th, 7th, and 9th) with increasing flow rate.
Frequency shifts exhibited a quadratic relationship with the volumetric flow rate.
This quadratic behavior was attributed to the nonlinear effects of the flowing fluid's normal pressure on the quartz resonator.

Conclusions:

Quartz TSM resonators are viable for developing flow sensors.
The developed TSM flow sensor offers advantages such as simplicity, rapid response, and good repeatability.
The findings provide a foundation for advanced acoustic sensor applications in fluid monitoring.