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Updated: Jun 19, 2026

An Atmospheric Pressure Plasma Setup to Investigate the Reactive Species Formation
Published on: November 3, 2016
Atomic-nitrogen production in a radio-frequency plasma source
Abstract:
The first high-resolution study, to our knowledge, of the optical emission from an Oxford Applied Research MPD21 nitrogen-plasma source is reported. The spectroscopic results clearly show that the MPD21 nitrogen-plasma source generates an appreciable flux of nitrogen atoms. This suggests that nitrogen atoms are the plasma species responsible for the successful p-type doping of ZnSe:N and related alloys.
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