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Related Experiment Video

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Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon

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Published on: July 17, 2020

Normal-incidence grating couplers in Ge-Si.

J Sarathy, R A Mayer, K Jung

|October 22, 2009

Summary

This summary is machine-generated.

We developed a grating coupler integrated with a Germanium-Silicon (GeSi) waveguide for efficient light coupling. This integrated device shows promising performance for optical applications.

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Last Updated: Jun 19, 2026

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Area of Science:

Photonics
Materials Science
Integrated Optics

Background:

Integrated optical devices require efficient methods for coupling light into waveguides.
Germanium-Silicon (GeSi) is a promising material for integrated photonics due to its compatibility with silicon fabrication processes.

Purpose of the Study:

To design, fabricate, and test a normal-incidence grating coupler monolithically integrated with a GeSi rib waveguide.
To theoretically analyze the performance of the grating coupler using coupler-mode theory.

Main Methods:

Monolithic integration of a 0.33-microm-period grating coupler with a Ge(0.04)Si(0.96) waveguide.
Fabrication and experimental testing of the integrated device.
Theoretical analysis using coupler-mode theory to predict coupling efficiency and angular dependence.

Main Results:

A measured coupling efficiency of 6.5% at normal incidence was achieved, closely matching the theoretical prediction of 6.9%.
The measured full width at half maximum (FWHM) of the acceptance angle was 5 degrees, compared to the theoretical prediction of 3 degrees.

Conclusions:

The monolithically integrated GeSi grating coupler demonstrates efficient light coupling at normal incidence.
The experimental results validate the theoretical predictions, confirming the viability of this integrated approach for photonic applications.