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Fabrication of Zero Mode Waveguides for High Concentration Single Molecule Microscopy
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Inverted hemispherical mask colloidal lithography.

Haixia Xu1, Wenyuan Rao, Jun Meng

  • 1State Key Laboratory of Optoelectronic Materials and Technologies, School of Physics and Engineering, Sun Yat-sen University, 135 West Xingang Road, Guangzhou 510275, People's Republic of China.

Nanotechnology
|October 23, 2009
PubMed
Summary
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A novel, cost-effective nanofabrication technique creates large-area 2D metal nanostructures on various surfaces. This method enables advanced applications like metamaterial hyperlenses by overcoming optical diffraction limits.

Area of Science:

  • Materials Science
  • Nanotechnology
  • Optics

Background:

  • Fabricating large-area, high-coverage 2D metal nanostructures on diverse surfaces presents significant challenges.
  • Existing methods often lack cost-effectiveness or scalability for complex surface topographies.

Purpose of the Study:

  • To develop an economical and versatile nanofabrication method for creating 2D metal nanostructures.
  • To demonstrate the fabrication of nanostructures on both flat and curved substrates.
  • To enable the creation of advanced optical devices such as metamaterial hyperlenses.

Main Methods:

  • Colloidal lithography using polystyrene (PS) spheres to create hemispherical dimples on a sacrificial polyacrylic acid (PAA) layer.
  • Transferring the PS layer onto the target substrate and subsequent oxygen plasma etching to form an inverted hemispherical mask.

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  • Utilizing the mask for a standard lift-off process to deposit metal nanostructures.

    • Main Results:

    • Successfully fabricated metal nano-disk and pair-disk arrays on flat surfaces.
    • Demonstrated the fabrication of 2D nanostructures on curved surfaces.
    • Confirmed the presence of surface plasmon resonance in periodic disk arrays via optical measurements.

    Conclusions:

    • The developed nanofabrication method is cost-effective and scalable for producing large-area 2D metal nanostructures.
    • The technique is suitable for patterning both flat and curved surfaces, broadening its applicability.
    • This method provides a pathway for fabricating components of metamaterial hyperlenses, potentially overcoming optical diffraction limitations.