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Updated: Jun 19, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
High-resolution surface-emitting spectrometer and deformation sensors with nonlinear waveguides
Abstract:
We investigate the limits of frequency resolution attainable in a nonlinear waveguide optical spectrometer, including the effects that are due to surface distortions and waveguide inhomogeneities, and demonstrate that the frequency-resolving capability is directly scalable with the radiating aperture length. The resolution of the waveguide is diffraction limited, and therefore the far-field radiation pattern can be used to characterize the phase variations along the waveguide that are due to surface distortions. The use of this device as a highly sensitive deformation sensor is demonstrated by application of a distortion to the waveguide and confirmation of the far-field diffraction pattern generated.

