High-efficiency multilayer dielectric diffraction gratings

The design and performance of a new type of high-efficiency diffraction grating for use in either transmission or reflection are described. The gratings are produced in a multilayer dielectric coating deposited upon optically flat substrates. By proper design of the multilayer stack and grating structure, a diffraction efficiency in excess of 96% for polarized light in the m = -1 order in reflection has been achieved.