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Updated: Jun 19, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Use of radio-frequency-pulse surface acoustic wave profilometry for passband engineering of acousto-optic tunable
Abstract:
One can determine the acoustic profile of an acousto-optic tunable filter (AOTF) either by measuring the intensity of a laser diffracted off the surface of an AOTF by the surface acoustic wave (SAW) or by measuring the optical output power of an AOTF as a short burst of rf energy is launched down the device. This rf-burst technique (also called pulse probing) is compared with the established optical diffraction SAW profilometry technique. We demonstrate the usefulness of rf-burst profilometry to measure the acousto-optic coupling as a function of position along an AOTF interaction region. Such a probe can be used to make adjustments to the acousto-optic coupling in real time to achieve passband shape modification in complex AOTF structures.
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