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Double circular erosion patterns on dielectric target in magnetron sputtering.

Yoshifumi Suzaki1, Hayato Miyagawa, Seiki Ejima

  • 1Department of Advanced Materials Science, Kagawa University, 2217-20 Hayashi-cho, Takamatsu, Kagawa 761-0396, Japan.

The Review of Scientific Instruments
|November 10, 2009
PubMed
Summary

This study investigates the double circular erosion pattern formed on silicon dioxide (SiO2) dielectric targets during radio frequency (RF) magnetron sputtering. We propose a qualitative model explaining this unique erosion pattern formation.

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Area of Science:

  • Materials Science
  • Plasma Physics
  • Surface Engineering

Background:

  • Radio frequency (RF) magnetron sputtering is a widely used deposition technique.
  • Circular erosion patterns on conductive targets are well-understood.
  • Dielectric targets exhibit a less understood double circular erosion pattern.

Purpose of the Study:

  • To investigate the formation mechanism of the double circular erosion pattern on SiO2 dielectric targets.
  • To analyze the influence of target properties and experimental conditions on the erosion pattern.

Main Methods:

  • Performed RF magnetron sputtering experiments using SiO2 dielectric targets.
  • Varied target insulation resistance and thickness.
  • Investigated the effect of a gap between the SiO2 target and a guard ring.

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Main Results:

  • Confirmed the formation of a double circular erosion pattern on SiO2 targets.
  • Demonstrated that pattern dimensions depend on insulation resistance and thickness.
  • Showed that pattern dimensions are influenced by the target-guard ring gap.

Conclusions:

  • Proposed a qualitative model for the double circular erosion pattern formation mechanism.
  • Highlighted the importance of target properties and experimental setup in controlling erosion patterns.
  • Provided foundational insights into dielectric target erosion in magnetron sputtering.