Very low loss reactively ion etched Tellurium Dioxide planar rib waveguides for linear and non-linear optics

We report on the fabrication and optical properties of the first very low loss nonlinear Tellurite planar rib waveguides ever demonstrated. A new reactive ion etch process based on Hydrogen as the active species was developed to accomplish the low propagation losses. Optical losses below approximately 0.05 dB/cm in most of the NIR spectrum and approximately 0.10 dB/cm at 1550 nm have been achieved - the lowest ever reported by more than an order of magnitude and clearly suitable for planar integrated devices. We demonstrate strong spectral broadening of 0.6 ps pulses in waveguides fabricated from pure TeO(2), in good agreement with simulations.