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Chemical mechanical planarization: slurry chemistry, materials, and mechanisms

Mahadevaiyer Krishnan1, Jakub W Nalaskowski, Lee M Cook

  • 1IBM T.J. Watson Research Center, Yorktown Heights, New York 10598, USA. krishnan@us.ibm.com

Chemical Reviews
|November 26, 2009
PubMed
Abstract

No abstract available in PubMed .

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