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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Improvement of the nonlinear dynamic response of a Z-tilts lead zirconate titanate-based compensation stage using the

Chien-Hung Liu1, Chieh-Li Chen, Hau-Wei Lee

  • 1Institute of Electro-Optical and Materials Science, National Formosa University, Yunlin 632, Taiwan. carus@nfu.edu.tw

The Review of Scientific Instruments
|December 2, 2009
PubMed

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