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Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
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Manifold enhancement of electron beam induced deposition rate at grazing incidence

Ilya Sychugov1, Yoshiko Nakayama, Kazutaka Mitsuishi

  • 1Quantum Dot Research Center, National Institute for Materials Science, Tsukuba, Ibaraki, Japan.

Nanotechnology
|December 4, 2009
PubMed

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