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Spatial coherence profilometry on tilted surfaces

Pavel Pavlicek1, Marek Halouzka, Zhihui Duan

  • 1Joint Laboratory of Optics of Palacky University, Institute of Physics of the Academy of Sciences of the Czech Republic, Tr. 17 listopadu 50a, CZ-772 07 Olomouc, Czech Republic. Pavel.Pavlicek@upol.cz

Applied Optics
|December 4, 2009
PubMed

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