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Parylene-based encapsulated fluid MEMS sensors.

Ellis Meng1, Christian Gutierrez

  • 1Department of Biomedical and Electrical Engineering, Viterbi School of Engineering, University of Southern California, Los Angeles, CA 90089-1111, USA. ellis.meng@usc.edu

Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society. Annual International Conference
|December 8, 2009
PubMed
Summary

Researchers developed novel Parylene C encapsulated fluid element transducers. These versatile devices function as impedance sensors and actuators, enabling applications in neural prosthetics and flexible electronics.

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Area of Science:

  • Materials Science
  • Biomedical Engineering
  • Microfluidics

Background:

  • Traditional sensors often lack flexibility for non-planar applications.
  • Neural recording electrode positioning requires precise and adaptable actuation methods.
  • Mimicking biological mechanotransduction offers new avenues for sensor design.

Purpose of the Study:

  • Introduce a new class of transducers utilizing Parylene C encapsulated fluid elements.
  • Explore the potential of these transducers as impedance-based contact sensors.
  • Investigate their use as electrolysis-based actuators for neural electrode positioning.

Main Methods:

  • Fabrication of transducers on thin, flexible substrates.
  • Characterization of impedance-based sensing capabilities.

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  • Development of electrolysis-based actuation mechanisms for fine positioning.

    • Main Results:

    • Demonstrated versatility as both sensors and actuators.
    • Successful application on non-planar and three-dimensional surfaces.
    • Exploration of distributed sensing networks emulating biological mechanotransduction.

    Conclusions:

    • Parylene C encapsulated fluid elements represent a versatile new transducer technology.
    • These transducers show significant promise for neural prosthetics and advanced sensing applications.
    • The ability to create distributed, interconnected sensing networks opens new possibilities in bio-inspired engineering.