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Updated: Jun 17, 2026

Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
Published on: February 5, 2020
Photonic crystal structures in ion-sliced lithium niobate thin films
Frederik Sulser1, Gorazd Poberaj, Manuel Koechlin
1Nonlinear Optics Laboratory, Institute of Quantum Electronics, ETH Zurich, 8093 Zurich, Switzerland.
Abstract:
We report on the first realization of photonic crystal structures in 600-nm thick ion-sliced, single-crystalline lithium niobate thin films bonded on a lithium niobate substrate using adhesive polymer benzocyclobutene (BCB). Focused ion beam (FIB) milling is used for fast prototyping of photonic crystal structures with regular cylindrical holes. Unwanted redeposition effects leading to conically shaped holes in lithium niobate are minimized due to the soft BCB layer underneath. A high refractive index contrast of 0.65 between the lithium niobate thin film and the BCB underlayer enables strong light confinement in the vertical direction. For TE polarized light a triangular photonic crystal lattice of air holes with a diameter of 240 nm and a separation of 500 nm has a photonic bandgap in the wavelength range from 1390 to 1500 nm. Experimentally measured transmission spectra show a spectral power dip for the GK direction of the reci ocal lattice with an extinction ratio of up to 15 dB. This is in good agreement with numerical simulations based on the three-dimensional plane wave expansion (PWE) and the finite-difference time-domain (FDTD) method.
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