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A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response
Published on: January 7, 2019
Silicon based total internal reflection bio and chemical sensing with spectral phase detection
Sergiy Patskovsky1, In-Hyouk Song, Michel Meunier
1Engineering Physics Department, Ecole Polytechnique de Montréal, C. P. 6079, succ. Centre-Ville, Montréal, Québec, Canada.
Optics Express
|December 10, 2009
Summary
Silicon-based total internal reflection (TIR) sensors offer a simpler, miniaturizable alternative to Surface Plasmon Resonance (SPR) devices. Spectral phase detection achieves SPR-level sensitivity for bio/chemical sensing.
Area of Science:
- Optoelectronics
- Biosensing technology
- Nanotechnology
Background:
- Surface Plasmon Resonance (SPR) is a dominant technology for bio/chemical sensing.
- Silicon-based sensors offer potential advantages in cost and miniaturization.
- Total Internal Reflection (TIR) sensing requires a high refractive index medium for sensitivity.
Purpose of the Study:
- To investigate the potential of Silicon-based TIR sensors as an alternative to SPR.
- To optimize spectral phase detection for enhanced sensitivity and low detection limits.
- To demonstrate the feasibility of miniaturized, cost-effective bio/chemical sensors.
Main Methods:
- Utilizing Silicon/Silicon Dioxide (Si/SiO2) interfaces in TIR geometry.
- Implementing spectral phase detection to measure phase differences of polarized light.
- Characterizing sensor performance and detection limits.
Main Results:
- Achieved a detection limit comparable to commercial SPR devices (10^-6 Refractive Index Units, RIU).
- Identified conditions for maximal phase-sensitive response in spectral phase detection.
- Demonstrated the high sensitivity granted by silicon's refractive index (3.56 at 1200 nm).
Conclusions:
- Si-based TIR sensors are a viable, cost-effective alternative to SPR.
- Spectral phase detection enables high sensitivity and simplified packaging/calibration.
- Advanced Si microfabrication facilitates sensor miniaturization.

