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Updated: Jun 17, 2026

Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies
Published on: June 12, 2018
Matthias Barczewski1, Stefan Walheim, Tobias Heiler
1Institute of Nanotechnology, Forschungszentrum Karlsruhe, Karlsruhe Institute of Technology, 76021 Karlsruhe, Germany. matthias.barczewski@int.fzk.de
This study introduces a novel photoinduced nanolithography technique for creating high-resolution, thick nanostructures. The method achieves unprecedented lateral resolution at thicknesses above 10 nm, overcoming previous limitations in constructive nanolithography.
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