A low power, on demand electrothermal valve for wireless drug delivery applications

We present a low power, on demand Parylene MEMS electrothermal valve. A novel Omega-shaped thermal resistive element requires low power (approximately mW) and enables rapid valve opening (approximately ms). Using both finite element analysis and valve opening experiments, a robust resistive element design for improved valve opening performance in water was obtained. In addition, a thermistor, as an inrush current limiter, was added into the valve circuit to provide variable current ramping. Wireless activation of the valve using RF inductive power transfer was demonstrated.