Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

Scanning Electron Microscopy01:07

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
Fundamental Principles
Accelerated...

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Assessing the Accuracy of Mass Attenuation Coefficients for Soft X-ray EPMA.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·2023
Same author

Element Depletion Due to Missing Boundary Fluorescence in Electron Probe Microanalysis: The Case of Ni in Olivine.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·2023
Same author

A track record of Au-Ag nanomelt generation during fluid-mineral interactions.

Scientific reports·2023
Same author

Electron Probe Microanalysis of Transition Metals using L lines: The Effect of Self-absorption.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·2021
Same author

Correction of Secondary Fluorescence Across Phase Boundaries in Electron Probe Microanalysis of Mineral Inclusions.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·2020
Same author

Determination of Mass Attenuation Coefficients of Th, U, Np, and Pu for Oxygen K<i>α</i> X-Rays Using an Electron Microprobe.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·2020

Related Experiment Video

Updated: Jun 17, 2026

Atom Probe Tomography Analysis of Exsolved Mineral Phases
08:14

Atom Probe Tomography Analysis of Exsolved Mineral Phases

Published on: October 25, 2019

Electron probe microanalysis of thin films and multilayers using the computer program XFILM.

Xavier Llovet1, Claude Merlet

  • 1Serveis Cientificotècnics, Universitat de Barcelona, Lluís Solé i Sabarís 1-3, 08028 Barcelona, Spain. xavier@sct.ub.es

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|December 25, 2009
PubMed
Summary

The XFILM program accurately determines thin film thickness and composition using electron probe microanalysis. Its updated X-ray emission model shows reliable performance for analyzing thin films and multilayers.

More Related Videos

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
07:24

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis

Published on: May 10, 2021

Nanoscale Characterization of Liquid-Solid Interfaces by Coupling Cryo-Focused Ion Beam Milling with Scanning Electron Microscopy and Spectroscopy
11:03

Nanoscale Characterization of Liquid-Solid Interfaces by Coupling Cryo-Focused Ion Beam Milling with Scanning Electron Microscopy and Spectroscopy

Published on: July 14, 2022

Related Experiment Videos

Last Updated: Jun 17, 2026

Atom Probe Tomography Analysis of Exsolved Mineral Phases
08:14

Atom Probe Tomography Analysis of Exsolved Mineral Phases

Published on: October 25, 2019

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
07:24

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis

Published on: May 10, 2021

Nanoscale Characterization of Liquid-Solid Interfaces by Coupling Cryo-Focused Ion Beam Milling with Scanning Electron Microscopy and Spectroscopy
11:03

Nanoscale Characterization of Liquid-Solid Interfaces by Coupling Cryo-Focused Ion Beam Milling with Scanning Electron Microscopy and Spectroscopy

Published on: July 14, 2022

Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Electron probe microanalysis (EPMA) is crucial for material characterization.
  • Accurate quantification of thin films and multilayers requires sophisticated modeling.
  • Existing EPMA software may have limitations in thin film analysis.

Purpose of the Study:

  • To describe the X-ray emission model in the latest XFILM version.
  • To assess the reliability of XFILM for thin film analysis.
  • To demonstrate XFILM's capabilities through application examples.

Main Methods:

  • Implementing and describing the new X-ray emission model in XFILM.
  • Comparing measured and calculated k-ratios from literature thin-film samples.
  • Utilizing electron probe microanalysis techniques.

Main Results:

  • The XFILM program accurately determines thin film thickness and composition.
  • The updated X-ray emission model demonstrates reliable performance.
  • Validation against literature data confirms the model's accuracy.

Conclusions:

  • XFILM is a reliable tool for thin film and multilayer analysis via EPMA.
  • The enhanced X-ray emission model improves quantitative accuracy.
  • XFILM offers versatile applications for material characterization.