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Updated: Jun 17, 2026
10:26
Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
Super-high-frequency two-port AlN contour-mode resonators for RF applications
Matteo Rinaldi1, Chiara Zuniga, Chengjie Zuo
1Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA, USA. rinaldim@seas.upenn.edu
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|December 31, 2009
Summary
This study introduces novel, ultra-thin piezoelectric microelectromechanical (MEMS) resonators. These devices enable the creation of narrow-band MEMS filters operating at superhigh frequencies above 3 GHz.
Area of Science:
- Materials Science
- Electrical Engineering
- Mechanical Engineering
Background:
- Microelectromechanical systems (MEMS) resonators are crucial for filtering applications.
- Existing MEMS filters face limitations in achieving superhigh frequencies.
- Piezoelectric materials like aluminum nitride (AlN) are key for resonator performance.
Purpose of the Study:
- To design and experimentally verify a new class of thin-film piezoelectric MEMS resonators.
- To enable the fabrication of narrow-band MEMS filters operating above 3 GHz.
- To push the operating frequency limits of AlN contour-mode resonator technology.
Main Methods:
- Design and fabrication of ultra-thin (250 nm) AlN films for MEMS resonators.
- Scaling of device dimensions to excite contour-extensional vibration modes.
- Experimental verification of 2-port resonators operating up to 4.5 GHz.
Main Results:
- Demonstration of piezoelectric MEMS resonators operating at superhigh frequencies (up to 4.5 GHz).
- Achieved electromechanical coupling (kt^2) exceeding 1.5%.
- Fabrication of the highest frequency MEMS filter (3.7 GHz) using AlN contour-mode resonator technology.
Conclusions:
- The developed MEMS resonators are suitable for high-frequency narrow-band filter applications.
- This work advances the capabilities of AlN-based contour-mode resonator technology.
- The findings pave the way for next-generation RF filtering solutions.
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