Updated: Jun 17, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
1Centre for Optical and Electromagnetic Research, State Key Laboratory for Modern Optical Instrumentation, East Building No.5, Zijingang Campus, Zhejiang University, Hangzhou 310058, China. dxdai@.zju.edu.cn
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