Phase modulation with micromachined resonant mirrors for low-coherence fiber-tip pressure sensors

This letter presents a simple phase modulation scheme for interrogation of low-coherence interferometry based fiber-tip pressure sensors to enable real-time monitoring and miniaturization of the entire sensor system. The key idea is to introduce a sinusoidal modulation signal and retrieve the sensing cavity length change using a simple algorithm, without resorting to any time information. In experiments, phase modulation has been achieved by using a silicon-micromachined tunable Fabry-Pérot interferometer, which is integrated with a light source and a photodiode onto a single chip. Compared with the conventional interrogation methods, this scheme possesses the merits of being less susceptible to disturbance, easy control and easy miniaturization, making it particularly suitable for sensing in constrained spaces and harsh environments.