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Related Experiment Video

Updated: Jun 17, 2026

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
10:32

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

Published on: January 9, 2014

Subwavelength silicon microcavities.

Jeffrey Shainline1, Stuart Elston, Zhijun Liu

  • 1Department of Physics, 184 Hope St., Brown University, Providence, RI 02912, USA. jeffrey.shainline@gmail.com

Optics Express
|January 7, 2010
PubMed
Summary
This summary is machine-generated.

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Researchers created the first subwavelength silicon microdisk resonators. These tiny devices exhibit whispering gallery modes, with the highest mode order achieving a measured quality factor of 1250.

Area of Science:

  • Optics and Photonics
  • Nanotechnology
  • Materials Science

Background:

  • Whispering gallery modes (WGMs) are crucial for optical resonators.
  • Miniaturizing optical resonators to dimensions smaller than the resonant wavelength presents significant challenges.
  • Subwavelength resonators offer potential for enhanced light-matter interactions and novel photonic devices.

Purpose of the Study:

  • To investigate the optical properties of the first silicon microdisk resonators smaller than the free-space resonant wavelength in all dimensions.
  • To characterize whispering gallery modes (WGMs) in these subwavelength structures.
  • To establish a relationship between resonator size, mode order, and quality factor.

Main Methods:

  • Fabrication of silicon microdisk resonators with diameters ranging from 1.35 to 1.89 micrometers.

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Last Updated: Jun 17, 2026

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Published on: January 9, 2014

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  • Spectral measurements of WGMs at wavelengths between 1.52 and 1.62 micrometers.
  • Theoretical calculations using the finite difference frequency domain (FDFD) method.

    • Main Results:

    • Successfully fabricated and characterized subwavelength silicon microdisk resonators.
    • Measured WGMs with azimuthal mode numbers (m) from 4 to 7.
    • Observed the highest azimuthal mode order (m=5) in a subwavelength cavity with a measured quality factor (Q) of 1250.
    • Results show excellent agreement with FDFD theoretical calculations.

    Conclusions:

    • The study demonstrates the feasibility of creating functional subwavelength microdisk resonators.
    • A clear exponential scaling law relating Q-factor to disk radius and mode number was identified.
    • These findings pave the way for advanced photonic devices utilizing subwavelength optical cavities.